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D6F Series MEMS Flow Sensors

Aratas D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Image	Part #	Mfr.	Description	Datasheet	Availability	Pricing (PEN) Filter the results in the table by unit price based on your quantity.	Qty.	Type	For Use With	Range	Accuracy	Output Voltage	Operating Supply Voltage	Port Size	Housing Material
Flow Sensors MEMS FLOW SENSOR D6F-50A7D-000-0 Aratas 1: S/ 871.41 8In Stock	Mfr. Part # D6F-50A7D-000-0 Mouser Part # 653-D6F-50A7D-000-0	Aratas	Flow Sensors MEMS FLOW SENSOR Learn More about Aratas omrond6fp	Datasheet	8In Stock	S/ 871.41 S/ 768.38 S/ 768.34 S/ 742.73 View S/ 733.35 Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 50 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec D6F-V03A1 Aratas 1: S/ 94.59 548In Stock	Mfr. Part # D6F-V03A1 Mouser Part # 653-D6F-V03A1	Aratas	Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec Learn More about Aratas omron d6f v mems flow sensor	Datasheet	548In Stock	S/ 94.59 S/ 84.43 S/ 81.24 S/ 76.80 View S/ 74.11 S/ 72.36 S/ 70.88	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 3 m/s	10 %	0 V to 2 V	3.15 V to 9.45 V	2 mm x 3 mm	Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-10A7D-000-0 Aratas 1: S/ 888.85 10In Stock	Mfr. Part # D6F-10A7D-000-0 Mouser Part # 653-D6F-10A7D-000-0	Aratas	Flow Sensors MEMS FLOW SENSOR Learn More about Aratas omrond6fp	Datasheet	10In Stock	S/ 888.85 S/ 831.87 S/ 801.35 S/ 800.88	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 10 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term D6F-P0001A1 Aratas 1: S/ 227.01 297In Stock	Mfr. Part # D6F-P0001A1 Mouser Part # 653-D6F-P0001A1	Aratas	Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term Learn More about Aratas omron d6f p mass flow sensors	Datasheet	297In Stock	S/ 227.01 S/ 201.44 S/ 191.08 S/ 190.81	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 0.1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter D6F-P0010A1 Aratas 1: S/ 227.09 1,180In Stock 2,075On Order	Mfr. Part # D6F-P0010A1 Mouser Part # 653-D6F-P0010A1	Aratas	Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter Learn More about Aratas omron d6f p mass flow sensors	Datasheet	1,180In Stock 2,075On Order On Order Ship Dates Mfr. #: D6F-P0010A1 Stock: 1,180 Can Ship Immediately On Order: 775 Expected 10/28/2026 1,300 Expected 1/1/2027 Factory Lead-Time: 26 Weeks	S/ 227.09 S/ 209.88 S/ 201.87 S/ 193.85 View S/ 191.08 S/ 190.77	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min			4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto D6F-P0010A2 Aratas 1: S/ 233.12 544In Stock	Mfr. Part # D6F-P0010A2 Mouser Part # 653-D6F-P0010A2	Aratas	Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto Learn More about Aratas omron d6f p mass flow sensors	Datasheet	544In Stock	S/ 233.12 S/ 215.26 S/ 206.38 S/ 193.26 View S/ 190.93 S/ 190.77	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min		0 V to 3.1 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec D6F-W04A1 Aratas 1: S/ 363.29 277In Stock	Mfr. Part # D6F-W04A1 Mouser Part # 653-D6F-W04A1	Aratas	Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec Learn More about Aratas omron d6f w mems flow sensors	Datasheet	277In Stock	S/ 363.29 S/ 337.05 S/ 327.24 S/ 315.53 S/ 310.54	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 4 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS air 0-10L/min D6F-10A5-000 Aratas 1: S/ 1,023.96 9In Stock 5Expected 1/8/2027 New At Mouser	Mfr. Part # D6F-10A5-000 Mouser Part # 653-D6F-10A5-000 New At Mouser	Aratas	Flow Sensors MEMS air 0-10L/min Learn More about Aratas omrond6fp	Datasheet	9In Stock 5Expected 1/8/2027	S/ 1,023.96 S/ 959.77 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-20A6-000 Aratas 1: S/ 1,085.42 17In Stock 48On Order New At Mouser	Mfr. Part # D6F-20A6-000 Mouser Part # 653-D6F-20A6-000 New At Mouser	Aratas	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	17In Stock 48On Order On Order Ship Dates Mfr. #: D6F-20A6-000 Stock: 17 Can Ship Immediately On Order: 21 Expected 1/1/2027 27 Expected 1/8/2027 Factory Lead-Time: 26 Weeks	S/ 1,085.42 S/ 1,017.38 S/ 957.48 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 D6F-CABLE2 Aratas 1: S/ 41.92 271In Stock New At Mouser	Mfr. Part # D6F-CABLE2 Mouser Part # 653-D6F-CABLE2 New At Mouser	Aratas	Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 Learn More about Aratas omrond6fp	Datasheet	271In Stock	S/ 41.92 S/ 37.95 S/ 36.47 S/ 34.76 View S/ 33.55 S/ 32.46 S/ 30.21 S/ 29.35	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Mass Flow Sensor D6F-03A3-000			1 V to 5 V
Flow Sensors MEMS Flow Sensor Manifold Mount D6F-P0010AM2 Aratas 1: S/ 246.43 88In Stock	Mfr. Part # D6F-P0010AM2 Mouser Part # 653-D6F-P0010AM2	Aratas	Flow Sensors MEMS Flow Sensor Manifold Mount Learn More about Aratas omron d6f p mass flow sensors	Datasheet	88In Stock	S/ 246.43 S/ 222.57 S/ 211.64 S/ 200.78 View S/ 195.75 S/ 191.98 Quote	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec D6F-W01A1 Aratas 1: S/ 364.10 133In Stock 75Expected 4/14/2027	Mfr. Part # D6F-W01A1 Mouser Part # 653-D6F-W01A1	Aratas	Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec Learn More about Aratas omron d6f w mems flow sensors	Datasheet	133In Stock 75Expected 4/14/2027	S/ 364.10 S/ 337.75 S/ 324.48 S/ 316.27 S/ 310.54	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 1 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor 10m/sec D6F-W10A1 Aratas 1: S/ 364.84 42In Stock 40Expected 2/5/2027	Mfr. Part # D6F-W10A1 Mouser Part # 653-D6F-W10A1	Aratas	Flow Sensors MEMS Velocity Sensor 10m/sec Learn More about Aratas omron d6f w mems flow sensors	Datasheet	42In Stock 40Expected 2/5/2027	S/ 364.84 S/ 338.45 S/ 323.93 S/ 316.89 S/ 310.54	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 10 m/s	5 %	6 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Airflow Sensor Air 0-10 LPM D6F-10A61-000 Aratas 1: S/ 1,102.82 1In Stock 23Expected 1/1/2027	Mfr. Part # D6F-10A61-000 Mouser Part # 653-D6F-10A61-000	Aratas	Flow Sensors MEMS Airflow Sensor Air 0-10 LPM Learn More about Aratas omrond6fp	Datasheet	1In Stock 23Expected 1/1/2027	S/ 1,102.82 S/ 1,033.89 S/ 988.46 S/ 969.27	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS Airflow Sensor Air 0-20 LPM D6F-20A61-000 Aratas 1: S/ 1,085.42 2In Stock 2Expected 12/22/2026	Mfr. Part # D6F-20A61-000 Mouser Part # 653-D6F-20A61-000	Aratas	Flow Sensors MEMS Airflow Sensor Air 0-20 LPM Learn More about Aratas omrond6fp	Datasheet	2In Stock 2Expected 12/22/2026	S/ 1,085.42 S/ 1,017.38 S/ 972.39 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-20A7D-000-0 Aratas 1: S/ 738.72 6In Stock	Mfr. Part # D6F-20A7D-000-0 Mouser Part # 653-D6F-20A7D-000-0	Aratas	Flow Sensors MEMS FLOW SENSOR Learn More about Aratas omrond6fp	Datasheet	6In Stock	S/ 738.72 S/ 718.71 S/ 701.82 S/ 697.26 View Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 20 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors Cable for D6F-P MEMS Flow Sensors D6F-CABLE1 Aratas 1: S/ 40.72 170In Stock	Mfr. Part # D6F-CABLE1 Mouser Part # 653-D6F-CABLE1	Aratas	Flow Sensors Cable for D6F-P MEMS Flow Sensors Learn More about Aratas omrond6fp	Datasheet	170In Stock	S/ 40.72 S/ 37.95 S/ 36.47 S/ 34.72 View S/ 33.51 S/ 32.15 S/ 31.14 S/ 29.86 S/ 29.35	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Flow Sensors CABLE FOR D6F D6F-CABLE3 Aratas 1: S/ 41.92 39In Stock New At Mouser	Mfr. Part # D6F-CABLE3 Mouser Part # 653-D6F-CABLE3 New At Mouser	Aratas	Flow Sensors CABLE FOR D6F Learn More about Aratas omrond6fp	Datasheet	39In Stock	S/ 41.92 S/ 37.95 S/ 36.47 S/ 34.29 View S/ 33.51 S/ 30.48 S/ 30.01 S/ 28.69	Min.: 1 Mult.: 1	Accessory, Cable	MEMS Flow Sensor
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-10A6-000 Aratas 1: S/ 1,086.44 43Expected 11/20/2026 New At Mouser	Mfr. Part # D6F-10A6-000 Mouser Part # 653-D6F-10A6-000 New At Mouser	Aratas	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	43Expected 11/20/2026	S/ 1,086.44 S/ 1,018.36 S/ 973.59 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-50A6-000 Aratas 1: S/ 1,085.38 8Expected 11/27/2026 New At Mouser	Mfr. Part # D6F-50A6-000 Mouser Part # 653-D6F-50A6-000 New At Mouser	Aratas	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	8Expected 11/27/2026	S/ 1,085.38 S/ 1,017.38 S/ 973.16 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Micro-Flow Sensor D6F-05N7-000 Aratas 1: S/ 1,132.95 Non-Stocked Lead-Time 28 Weeks	Mfr. Part # D6F-05N7-000 Mouser Part # 653-D6F-05N7-000	Aratas	Flow Sensors MEMS Micro-Flow Sensor Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 28 Weeks	S/ 1,132.95 S/ 1,015.55	Min.: 1 Mult.: 1	Micro-Flow Sensor	City Gas	0 L/min to 5 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V
Flow Sensors MEMS air 0-50L/min D6F-50A5-000 Aratas 1: S/ 1,085.42 Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-50A5-000 Mouser Part # 653-D6F-50A5-000	Aratas	Flow Sensors MEMS air 0-50L/min Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 26 Weeks	S/ 1,085.42 S/ 1,017.38 S/ 973.16 S/ 952.81	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors FLOW SENSOR D6F-50A61-000 Aratas 1: S/ 1,047.71 Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-50A61-000 Mouser Part # 653-D6F-50A61-000	Aratas	Flow Sensors FLOW SENSOR	Datasheet	Non-Stocked Lead-Time 26 Weeks	S/ 1,047.71 S/ 995.12	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min
Flow Sensors MEMS FLOW SENSOR D6F-70AB71D-000-0 Aratas 10: S/ 800.88 Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-70AB71D-000-0 Mouser Part # 653-D6F-70AB71D-0000	Aratas	Flow Sensors MEMS FLOW SENSOR Learn More about Aratas omrond6fp	Datasheet	Non-Stocked Lead-Time 26 Weeks	S/ 800.88	Min.: 10 Mult.: 10	MEMS Flow Sensor	Air	0 L/min to 70 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS air 0-20L/min D6F-20A5-000 Aratas 1: S/ 935.21 Non-Stocked End of Life	Mfr. Part # D6F-20A5-000 Mouser Part # 653-D6F-20A5-000 End of Life	Aratas	Flow Sensors MEMS air 0-20L/min Learn More about Aratas omron d6f gas mass flow sensors	Datasheet	Non-Stocked	S/ 935.21 S/ 928.01 S/ 898.97 S/ 873.44 View S/ 869.20 Quote	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy

D6F Series MEMS Flow Sensors

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